讲座题目 ：Differential Wavefront Sensing and Dynamic Phase Compensation for Piezo Stage Calibration 

主 讲 人：Jonathan D. Ellis

讲座时间：2015年8月26日(星期三)  10:00 

讲座地点：研发大厦第一会议室 

内容简介：Dynamic metrology impacts both the measurement target size and the signal processing electronics. In this work, we describe a method to measure piezo stages dynamically using Differential Wavefront Sensing (DWS). DWS enables simultaneous measurement of the displacement, pitch, and yaw of a target, while only requiring a small measurement target. We describe a method for compensating the dynamic phase effects in the signal processing electronics to reduce the error in non-constant velocity motion profiles.  

主讲人介绍：Dr. Ellis current runs the Precision Instrumentation Group, focused on advancing precision system design, metrology, and manufacturing. Dr. Ellis just completed a three year term on the Board of Directors for the American Society for Precision Engineering, where he has been a member since 2006. He is also a member of the Optical Society of America (OSA), SPIE, and the IEEE Instrumentation & Measurement Society. 

                                                       国际合作处

                                                       2015-8-25